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Recherche en cours…
LIGA and its Applications (Advanced Micro and Nanosystems)
2008
Introduction to microelectromechanical systems engineering
Nadim Ilyas Maluf, Kirt Williams
2004
MEMS & Microsystems
Tai-Ran Hsu
2008
Micro-optomechatronics
2005
MEMS-based integrated navigation
2010
Mechanics of microelectromechanical systems
Nicolae Lobontiu, Ephrahim Garcia
2005
MicroMechatronics (Materials Engineering, 22)
Kenji Uchino
2003
Nano- and micro-electromechanical systems
Sergey Edward Lyshevski
2005